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2D material Detection and Transfer System

for fabricating 2D heterostructures, magic angle devices,

twistronics devices

 

Achieve Precise and Reproducible fabrication for moiré superlattice, magic angle (1.1° for superconductivity) twisted device, exciton superlattices so-called for twistronics,

Innovative Features:

  • "A unique feature available only in our system: automatic detection and localization of 2D materials prior to transfer."

  • Stamp stage: Z-axis motorized, (Optional, XY-motorized), accurate speed, distance control from PC application

  • Heater Stage: 80 mm × 80 mm, Up to 200 °C, PID Temperature Control from PC app.

  • vacuum chucks: Secure wafer handling is achieved using a vacuum chuck during the pickup and transfer process. With a spacious stage capable of holding up to five vacuum chucks, multiple 2D materials can be prepared simultaneously. This unique design significantly streamlines the fabrication of van der Waals heterostructures, enabling researchers to quickly alternate between different materials and build complex multilayer devices with maximum efficiency.

  • Rotation stage for sample (optionally motorized): compatible for "Tear-and-Stack" method for twisted van der Waals heterostructures (0.1° rotation accuracy guaranteed )

  • Tilt stages (goniometer and rotation stage) for stamp

  • Compact design allowing installation in a glove box for air sensitive materials.

  • The Transfer system can be ordered either together with a 2D detector or separately.

laser direct writer tilted view
laser direct writer front view
laser writer side view

UVW04

  • Micro patterning for device fabrication

  • Laser writer (micro pattern) + e-beam lithography (nano pattern)

  • Maskless Photolithography drawing micro patterns

  • Circular mode: CAD pattern (4 layers w/ different doses)

  • Raster mode: image file (BW Image pixels: 1000 x 1000)

  • Vector mode: line drawing by mousing drawing

  •  Light source: UV laser (405 nm) beam

  • Objective lens: 5x, 10x, 20x, 50x, 100x

  • hardware: XYZ motorized micro-stage and optical microscope

  • writing software: compatitble for CAD file (dxf), and  BW image file and Mouse drawing line patterns paths

  • vector line drawing: The user draws lines directly with the mouse while looking at the microscope image of sample, and the scanner draws a pattern along these lines.

  • maximum writing speed: 600 um/sec

  • minimum spot size: 1 um

  • 2 writing modes: area filling with low resolution + line drawing with high resolution

  • Photoresist: compatible for general optical lithography PR

  • Applications: solar cell electrodes, big electrodes in micro-device, contact pad for device, microfluidics device

  • XY stage with ​substrate tilt correction

  • Optionally Combined with Scanning Photocurrent Microscope 

  • Price: ~$23,000 (+3,000 SPCM combined)

Sejong Scientific Instruments Inc.

​Customized research equipment specialist company

sales@sejongsciinst.com

010-4892-3458

©2021 by Sejong Sci Inst.

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