LASER DIRECT WRITER

Photolithography  equipment drawing micro patterns , using UV laser (405 nm) beam and 50x  to 100x  objective lens

• hardware: XYZ motorized micro-stage and optical microscope

• image writing software:  open black-and-white image files with pattens and write the pattern like a pen, tracing shortest paths

• vector line drawing: The user draws lines directly with the mouse while looking at the microscope image of the board, and the scanner draws a pattern along these lines.

• maximum writing speed: 700 um/sec

• minimum spot size: 1 um

• 2 writing modes: area filling with low resolution + line drawing with high resolution

• Photoresist: compatible for general optical lithography PR

• Applications: solar cell electrodes, big electrodes in micro-device, contact pad for device, microfluidics device, lab-on-a-chip

• Image pixels: 1000 x 1000

• ​sample stage tilt correction 

• Price: ~$23,000